MEMS
2017-1

Professor: Oscar E. Ramos, Ph.D.
Syllabus: [pdf]
Lectures: Mondays 12-3 pm, Labs: Tuesdays 8-12 am (L601)
Textbook: Chang Liu, Foundations of MEMS, 2nd ed, Pearson Education, 2012

Lectures

  1. Introduction to MEMS and Microfabrication: [pdf]
  2. Essential Electrical and Mechanical Concepts: [part 1] [part 2] [part 3]
  3. Electrostatic Sensing and Actuation: [pdf]
  4. Thermal Sensing and Actuation: [pdf]
  5. Introduction to Optical MEMS: [pdf]
  6. Piezoresistive Sensors: [pdf]
  7. Piezoelectric Sensing and Actuation: [pdf]
  8. Microfabrication Tecnhologies: [pdf]
  9. Microfluidics: [pdf]
  10. BioMEMS (guest lecturer: Aaron Fleischmann - Cleveland Clinic)

Labs

  • Lab 1: Introduction to Comsol
  • Lab 2: Creating a Microgripper
  • Lab 3: Capacitive Accelerometer
  • Lab 4: Microresistor Beam and Piezoresistive Sensor
  • Lab 5: Piezoelectric Shear Actuated Beam
  • Lab 6: Micropump Mechanism

Quizzes and Exams

  • Quiz 1 (April 10)
  • Quiz 2 (May 1)
  • Midterm Exam
  • Quiz 3 (May 29)
  • Quiz 4 (June 18)
  • Final Exam